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Nikon Nexiv #VMR-C4540 Wafer Carrier measuring sys, 18.9" x7.1" x15.7" measuring hd str

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Nikon Nexiv #VMR-C4540 Wafer Carrier measuring sys, 18.9" x7.1" x15.7" measuring hd str
(1) Used Nikon Model Nexiv VMR-C4540, Wafer Carrier Measuring System, New 2007

Short Description:
Non-Contact, Fully Automatic Measurement Provides Outstanding Throughput. Perfect For Measuring FOUP And FOSB.
o Four Side Planes Of The Carrier Are Continuously Measured By Rotating The Kinematic Plate In 90ï½ Increments
o Semi-Compliant Kinematic Plate Provides Perfect XYZ Coordinates
o Variety Of Illumination Choices Facilitate Accurate Measurements Of Registration Pin Holes And Latch-Key Holes
o Laser AF Provides Fast, Non-Contact Measurements Of Wafer Positions
o Wide Area, High-Intensity Led Illumination Enables Accurate Measurements Of Wafer Heights
o 300mm, 200mm Wafer Carrier And SMIF Pod Base

Specifications
Compatible Carriers: (FOUP, FOSB, OC)        Semi-Compliant ï½300mm Wafer Carriers
                                    200mm Wafer Carriers (With Dedicated Adapter)
Stroke: Measuring Head (X X Y X Z)            480 X 180 X 400 Mm (18.9 X 7.1 X 15.7 In.)
Rotary Table:                               360ï½ (In 90ï½ Increments)
Minimum Readout:                         0.1ï½m
Head Travel Speed:                         XZ Axis: Max. 200mm/S (7.9 In.)
Y Axis: Max.                               50mm/S (2.0 In.)
Kinematic Plate Rotation Speed:             90ï½/2 Sec.
Camera                                B&W 1/2-In. CCD
Optical Magnification:                    0.27x To 2.74x (5-Step 10x Zoom)
Field Of View:                               20 X 16 Mm To 2.0 X 1.6 Mm
Max. Work Piece Weight                    15kg (33.1 Lb.)
Measuring Accuracy                         (10   10l/1000)ï½m, L = Measuring Length In Mm
Repeatability                               (2s)2ï½m
Illuminatione, Piscopic, Diascopic, Darkfield
Auto Focus                               Laser AF, Vision AF
Power Source                               AC100-240vï½10%, 50/60hz
Power Consumption (Approx.)                   AC100-120v: 13a (Main Unit), 9a (Pc)
                                    AC200-240v: 7a (Main Unit), 5a (Pc)
Dimensions                               1400 (W) X 1739 (D) X 2530 (H) Mm (55.1 X 68.5 X 99.6 In.)
Weight                                1400kg (3086.41 Lb.)
Host Computer                          IBM Pc/At (Windowsï½ XP)
Monitor                               19-In. TFT

Specifications and Equipment are Preliminary, Subject to Buyer Verification.


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